microelectromechanicalsystem(MEMS)相关论文
A new design of staggered array semi-packed micro gas chromatographic column was presented based on the micro electromec......
Design and simulation results of a novel multifunctional electronic calibration kit based on microelectromechani-cal sys......
...
设计了一种基于氮化铝(AlN)材料的压电连续面型变形镜，采用理论分析和COMSOL仿真对该AlN MEMS变形镜的结构进行了优化，拟合了前14项Z......
对一种平面、管道复合型压电微机器人的平面致动机理和谐振进行了分析，为该机器人提高爬行速度、选择控制电压的谐振频率提供了依据......
